We demonstrate fabrication of a high quality factor lithium niobate doubledisk whisperinggallery microcavity using femtosecond laser assisted ion beam milling. Using this method, two vertically stacked 30μmdiameter disks with a 200nmgap are fabricated. With our device, an optical quality factor as high as ×105 is demonstrated.
Spodumene Ball Mill Brief Introduction of Spodumene. Spodumene is a pyroxene mineral with a predominant composition of lithium aluminum silicate.